Light emitting device and method of manufacturing same

ABSTRACT

A method of manufacturing a light emitting device includes: providing a semiconductor stack including a first semiconductor layer and a second semiconductor layer; forming light emitting cells by forming grooves in column and row directions; exposing a portion of the first semiconductor layer from the second semiconductor layer in each light emitting cell; forming a first insulation layer having a first hole on the light emitting cells and the grooves; forming a wiring electrode to be in electrical connection with the first semiconductor layer at the first hole in each light emitting cell; forming a second hole in the first insulation layer; forming a second electrode to be in electrical connection with the second semiconductor layer at the second hole; thinning the first semiconductor layer; and exposing the first insulation layer from the first semiconductor layer at the grooves while roughening the surface of the first semiconductor layer.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority to Japanese Patent Application No.2018-105648, filed on May 31, 2018, which claims priority to JapanesePatent Application No. 2017-129965, filed on Jun. 30, 2017, thedisclosures of which are hereby incorporated by reference in theirentireties.

BACKGROUND

The present disclosure relates to a light emitting device and a methodof manufacturing the light emitting device.

As a high emission efficiency semiconductor light emitting device, oneconstructed with a plurality of light emitting cells arranged verticallyand horizontally in a grid on a plane has been known as disclosed inJapanese Unexamined Patent Application Publication No. 2015-156431. Thissemiconductor light emitting device has at least one first electrodepartitioning the semiconductor structure layer into a plurality of lightemitting segments, and at least one light reflecting groove formed onthe surface of the first semiconductor layer between adjacent lightemitting segments in the plurality of light emitting segments. The lightreflecting groove includes a light reflecting film formed on the lateralfaces thereof.

Furthermore, Japanese Unexamined Patent Application Publication No.2013-016875 discloses a light emitting device having a construction inwhich a first electrode is disposed on the same side of the substrate asthat having the first face at which a rough surface of the secondconductivity type nitride semiconductor layer is formed.

SUMMARY

However, in these conventional semiconductor light emitting devices, then-side electrode, which is the first electrode in electrical connectionwith the semiconductor structure layer, is disposed between the lightemitting cells. Thus, in the conventional semiconductor light emittingdevices, at least two light emitting cells are turned on, it is thusdifficult to individually turn on the light emitting cells. Moreover, inthe semiconductor light emitting devices, the semiconductor structurelayer portion is laterally continuous, and the semiconductor structurelayer is also located higher than the bottom faces of the lightreflecting grooves defining the light emitting segments. Thus, the lightpropagates in the semiconductor structure layer, reducingdistinguishability.

Accordingly, one object of certain embodiments of the present disclosureis to provide a light emitting device having good distinguishabilitywhen the light emitting cells are individually turned, and a method ofmanufacturing the same.

A method of manufacturing a light emitting device according to oneembodiment of the present disclosure includes: providing a semiconductorstack including a first semiconductor layer, and a second semiconductorlayer disposed on an upper face of the first semiconductor layer;forming a plurality of light emitting cells arranged in column and rowdirections by forming a plurality of grooves in the semiconductor stackfrom an upper face side of the semiconductor stack, the grooves reachingthe first semiconductor layer; exposing a portion of the firstsemiconductor layer from the second semiconductor layer by partiallyremoving the second semiconductor layer from an upper face side of thesecond semiconductor layer in each of the light emitting cells; forminga first insulation layer continuously on the light emitting cells andthe grooves, the first insulation layer having a first hole on the firstsemiconductor layer exposed from the second semiconductor layer in eachof the light emitting cells; forming a wiring electrode to be inelectrical connection with the first semiconductor layer at the firsthole in each of the light emitting cells so as to cover the firstinsulation layer on or above the upper face of the second semiconductorlayer excluding a prescribed region; forming a second hole in the firstinsulation layer on or above the prescribed region of the upper face ofthe second semiconductor layer in each of the light emitting cells;forming a second electrode in each of the light emitting cells to be inelectrical connection with the second semiconductor layer at the secondhole; thinning the first semiconductor layer from a lower face side ofthe first semiconductor layer by dry etching or polishing so as not toreach the first insulation layer formed on the grooves; and subsequentto the step of thinning the first semiconductor layer by dry etching,removing a portion of the first semiconductor layer in a thicknessdirection from the lower face side of the first semiconductor layer bywet etching, thereby exposing the first insulation layer from the firstsemiconductor layer at locations of the grooves while roughening asurface of the first semiconductor layer that has been partially removedby the step of thinning the first semiconductor layer.

Furthermore, a method of manufacturing a light emitting device accordingto another embodiment of the present disclosure includes: providing asemiconductor stack including a first semiconductor layer and a secondsemiconductor layer disposed on an upper face of the first semiconductorlayer; forming a plurality of light emitting cells arranged in columnand row directions by forming a plurality grooves in the semiconductorstack from an upper face side of the semiconductor stack, the groovesreaching the first semiconductor layer; exposing a portion of the firstsemiconductor layer from the second semiconductor layer by partiallyremoving the second semiconductor layer from an upper face side of thesecond semiconductor layer in each of the light emitting cells; forminga first insulation layer continuously on the light emitting cells andthe grooves, the first insulation layer having a second hole above aprescribed region of the upper face of the second semiconductor layer ineach of the light emitting cells; forming a wiring electrode to be inelectrical connection with the second semiconductor layer at the secondhole in each of the light emitting cells so as to cover the firstinsulation layer on or above the upper face of the second semiconductorlayer excluding the prescribed region, the first hole being formed inthe first semiconductor layer and the first insulation layer; forming afirst hole in the first insulation layer on or above the firstsemiconductor layer exposed from the second semiconductor layer in eachof the light emitting cells; forming a first electrode in each of thelight emitting cells to be in electrical connection with the firstsemiconductor layer at the first hole; thinning the first semiconductorlayer from a lower face side of the first semiconductor layer by dryetching or polishing so as not to reach the first insulation layerformed on the grooves; and subsequent to the step of thinning the firstsemiconductor layer, removing a portion of the first semiconductor layerin a thickness direction from the lower face side of the firstsemiconductor layer by wet etching, thereby exposing the firstinsulation layer from the first semiconductor layer at locations of thegrooves while roughening a surface of the first semiconductor layerpartially removed by step of thinning the first semiconductor layer.

A light emitting device according to one embodiment of the presentdisclosure includes: a plurality of light emitting cells arranged incolumn and row directions, each light emitting cell including asemiconductor stack that includes a first semiconductor layer and asecond semiconductor layer, the second semiconductor layer beingdisposed on the upper face of the first semiconductor layer such that aportion of an upper face of the first semiconductor layer is exposedfrom the second semiconductor layer; a first insulation layercontinuously disposed on the light emitting cells and having a firsthole located on the first semiconductor layer exposed from the secondsemiconductor layer in each of the light emitting cells, and a secondhole located on the second semiconductor layer in each of the lightemitting cells; a wiring electrode having light reflectivity anddisposed to cover the first insulation layer to be in electricalconnection with the first semiconductor layer at the first hole in eachof the light emitting cells; and a second electrode disposed in each ofthe light emitting cells to be in electrical connection with the secondsemiconductor layer at the second hole. The first insulation layer isexposed from the first semiconductor layer between the plurality oflight emitting cells. The lower face of the first semiconductor layerhas a roughened surface.

A light emitting device according to another embodiment of the presentdisclosure includes: a plurality of light emitting cells arranged incolumn and row directions, each light emitting cell including asemiconductor stack that includes a first semiconductor layer and asecond semiconductor layer, the second semiconductor layer beingdisposed on the upper face of the first semiconductor layer such that aportion of an upper face of the first semiconductor layer is exposedfrom the second semiconductor layer; a first insulation layercontinuously disposed on the light emitting cells and having a firsthole located on the first semiconductor layer exposed from the secondsemiconductor layer in each of the light emitting cells, and a secondhole located on the second semiconductor layer in each of the lightemitting cells; a first electrode disposed in each of the light emittingcells to be in electrical connection with the first semiconductor layerat the first hole; and a wiring electrode having light reflectivity anddisposed to cover the first insulation layer to be in electricalconnection with the second semiconductor layer at the second hole ineach of the light emitting cells. The first insulation layer is exposedfrom the first semiconductor layer between the light emitting cells. Alower face of the first semiconductor layer has a roughened surface.

According to the light emitting devices of certain embodiments of thepresent disclosure, distinguishability when the light emitting cells areindividually turned on can be improved. Furthermore, according to themethods of manufacturing a light emitting device according to theembodiments of the present disclosure, light emitting devices havinggood distinguishability can be manufactured.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic side view of one example of the light emittingdevice according to one embodiment.

FIG. 2A is a schematic plan view of the light emitting cells of thelight emitting device according to the embodiment.

FIG. 2B is a schematic view enlarging a portion of FIG. 2A.

FIG. 3A is a sectional view of the method of manufacturing the lightemitting device according to the embodiment, schematically showing thelight emitting cell group which is provided with bumps and mounted on anIC substrate electrode with a resist formed thereon.

FIG. 3B is a view of the method of manufacturing the light emittingdevice according to the embodiment, which is a schematic sectional viewof the formation of a filler on the mounted light emitting cell group.

FIG. 3C is a view of the method of manufacturing the light emittingdevice according to the embodiment, which is a schematic section afterthe substrate being removed from the light emitting cell group.

FIG. 3D is a view of the method of manufacturing the light emittingdevice according to the embodiment, which is a schematic sectional viewof the semiconductor layers of the light emitting cell group after beingsubjected to dry etching.

FIG. 3E is a sectional view showing the method of manufacturing thelight emitting device according to the embodiment, schematically showingthe semiconductor layer after being subjected to wet etching.

FIG. 3F is a sectional view showing the method of manufacturing thelight emitting device according to the embodiment, schematically showinga phosphor layer disposed on the light emitting cell group.

FIG. 4 is a flowchart for the method of manufacturing the light emittingdevice according to a first embodiment.

FIG. 5A is a schematic plan view, enlarged one of the light emittingcells after forming a full-surface electrode layer on the semiconductorstack in the method of manufacturing the light emitting device accordingto the first embodiment.

FIG. 5B is a sectional view taken along line VB-VB in FIG. 5A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 5C is a sectional view taken along line VC-VC in FIG. 5A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 6A is a schematic plan view, enlarging a portion of thesemiconductor stack after forming grooves by partially etching thesemiconductor stack in the method of manufacturing the light emittingdevice according to the first embodiment.

FIG. 6B is a sectional view taken along line VIB-VIB in FIG. 6A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 6C is a sectional view taken along line VIC-VIC in FIG. 6A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 7A is a schematic plan view, enlarged one of the light emittingcells after forming an opening which exposes the first semiconductorlayer from the second semiconductor layer by partially removing thefull-surface electrode and the first semiconductor layer in the methodof manufacturing the light emitting device according to the firstembodiment.

FIG. 7B is a sectional view taken along line VIIB-VIIB in FIG. 7A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 7C is a sectional view taken along line VIIC-VIIC in FIG. 7A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 8A is a schematic plan view, enlarged one of the light emittingcells after forming a first insulation layer continuously on the lightemitting cell group and the grooves in the method of manufacturing thelight emitting device according to the first embodiment.

FIG. 8B is a sectional view taken along line VIIIB-VIIIB in FIG. 8A inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 8C is a sectional view taken along line VIIIC-VIIIC in FIG. 8A inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 9A is a schematic plan view, enlarged one of the light emittingcells after forming a first hole in the first semiconductor layer in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 9B is a sectional view taken along line IXB-IXB in FIG. 9A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 9C is a sectional view taken along line IXC-IXC in FIG. 9A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 10A is a schematic plan view, enlarged one of the light emittingcells where a connection electrode is formed in the first hole to be inelectrical connection with the first semiconductor layer in the methodof manufacturing the light emitting device according to the firstembodiment.

FIG. 10B is a sectional view taken along line XB-XB in FIG. 10A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 10C is a sectional view taken along line XC-XC in FIG. 10A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 11A is a schematic plan view, enlarged one of the light emittingcells after forming a wiring electrode on the first insulation layer inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 11B is a sectional view taken along line XIB-XIB in FIG. 11A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 11C is a sectional view taken along line XIC-XIC in FIG. 11A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 12A is a schematic plan view, enlarged one of the light emittingcells after forming a second insulation layer on the wiring electrode inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 12B is a sectional view taken along line XIIB-XIIB in FIG. 12A inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 12C is a sectional view taken along line XIIC-XIIC in FIG. 12A inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 13A is a schematic plan view, enlarged one of the light emittingcells after forming a third hole in the second insulation layer andsecond holes in the first insulation layer in the method ofmanufacturing the light emitting device according to the firstembodiment.

FIG. 13B is a sectional view taken along line XIIIB-XIIIB in FIG. 13A inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 13C is a sectional view taken along line XIIIC-XIIIC in FIG. 13A inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 13D is a sectional view taken along line XIIID-XIIID in FIG. 13A inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 14A is a schematic plan view, enlarged one of the light emittingcells after forming a second electrode on the second insulation layer inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 14B is a sectional view taken along line XIVB-XIVB in FIG. 14A inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 14C is a sectional view taken along line XIVC-XIVC in FIG. 14A inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 14D is a sectional view taken along line XIVD-XIVD in FIG. 14A inthe method of manufacturing the light emitting device according to thefirst embodiment.

FIG. 15A is a schematic plan view, enlarged one of the light emittingcells after forming bumps on the first electrode and the secondelectrode in the method of manufacturing the light emitting deviceaccording to the first embodiment.

FIG. 15B is a sectional view taken along line XVB-XVB in FIG. 15A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 15C is a sectional view taken along line XVC-XVC in FIG. 15A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 15D is a sectional view taken along line XVD-XVD in FIG. 15A in themethod of manufacturing the light emitting device according to the firstembodiment.

FIG. 16 is a schematic sectional view, enlarged one of the lightemitting cells after reducing the thickness of the semiconductor layerby dry etching in the method of manufacturing the light emitting deviceaccording to the first embodiment.

FIG. 17 is a schematic sectional view, enlarged one of the lightemitting cells after performing a roughening process on the surface ofthe semiconductor layer by wet etching in the method of manufacturingthe light emitting device according to the embodiments.

FIG. 18 is a flowchart for the method of manufacturing the lightemitting device according to a second embodiment.

FIG. 19A is a schematic plan view, enlarged one of light emitting cellsafter forming a full-surface electrode layer on the semiconductor stackin the method of manufacturing the light emitting device according tothe second embodiment.

FIG. 19B is a sectional view taken along line XIXB-XIXB in FIG. 19A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 19C is a sectional view taken along line XIXC-XIXC in FIG. 19A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 20A is a schematic plan view, enlarged one of the light emittingcells after forming grooves by partially etching the semiconductor stackin the method of manufacturing the light emitting device according tothe second embodiment.

FIG. 20B is a sectional view taken along line XXB-XXB in FIG. 20A in themethod of manufacturing the light emitting device according to thesecond embodiment.

FIG. 20C is a sectional view taken along line XXC-XXC in FIG. 20A in themethod of manufacturing the light emitting device according to thesecond embodiment.

FIG. 21A is a schematic plan view, enlarged one of the light emittingcells after forming an opening that exposes the first semiconductorlayer from the second semiconductor layer by partially removing thefull-surface electrode and the first semiconductor layer in the methodof manufacturing the light emitting device according to the secondembodiment.

FIG. 21B is a sectional view taken along line XXIB-XXIB in FIG. 21A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 21C is a sectional view taken along line XXIC-XXIC in FIG. 21A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 22A is a schematic plan view, enlarged one of the light emittingcells after forming a first insulation layer continuously on the lightemitting cell group and the grooves in the method of manufacturing thelight emitting device according to the second embodiment.

FIG. 22B is a sectional view taken along line XXIIB-XXIIB in FIG. 22A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 22C is a sectional view taken along line XXIIC-XXIIC in FIG. 22A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 23A is a schematic plan view, enlarged one of the light emittingcells after creating second holes in the first insulation layer in themethod of manufacturing the light emitting device according to thesecond embodiment.

FIG. 23B is a sectional view taken along line XXIIIB-XXIIIB in FIG. 23Ain the method of manufacturing the light emitting device according tothe second embodiment.

FIG. 23C is a sectional view taken along line XXIIIC-XXIIIC in FIG. 23Ain the method of manufacturing the light emitting device according tothe second embodiment.

FIG. 24A is a schematic plan view, enlarged one of the light emittingcells after forming a wiring electrode on the first insulation layer inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 24B is a sectional view taken along line XXIVB-XXIVB in FIG. 24A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 24C is a sectional view taken along line XXIVC-XXIVC in FIG. 24A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 25A is a schematic plan view, enlarged one of the light emittingcells after forming a second insulation layer on the wiring electrode inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 25B is a sectional view taken along line XXVB-XXVB in FIG. 25A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 25C is a sectional view taken along line XXVC-XXVC in FIG. 25A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 26A is a schematic plan view, enlarged one of the light emittingcells after forming a third hole in the second insulation layer and afirst hole in the first insulation layer in the method of manufacturingthe light emitting device according to the second embodiment.

FIG. 26B is a sectional view taken along line XXVIB-XXVIB in FIG. 26A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 26C is a sectional view taken along line XXVIC-XXVIC in FIG. 26A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 26D is a sectional view taken along line XXVID-XXVID in FIG. 26A inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 27A is a schematic plan view, enlarged one of the light emittingcells on which a first electrode and a second electrode are formed inthe method of manufacturing the light emitting device according to thesecond embodiment.

FIG. 27B is a sectional view taken along line XXVIIB-XXVIIB in FIG. 27Ain the method of manufacturing the light emitting device according tothe second embodiment.

FIG. 27C is a sectional view taken along line XXVIIC-XXVIIC in FIG. 27Ain the method of manufacturing the light emitting device according tothe second embodiment.

FIG. 27D is a sectional view taken along line XXVIID-XXVIID in FIG. 27Ain the method of manufacturing the light emitting device according tothe second embodiment.

FIG. 28A is a schematic plan view, enlarged one of the light emittingcells after forming bumps on the first electrode and the secondelectrode in the method of manufacturing the light emitting deviceaccording to the second embodiment.

FIG. 28B is a sectional view taken along line XXVIIIB-XXVIIIB in FIG.28A in the method of manufacturing the light emitting device accordingto the second embodiment.

FIG. 28C is a sectional view taken along line XXVIIIC-XXVIIIC in FIG.28A in the method of manufacturing the light emitting device accordingto the second embodiment.

FIG. 28D is a sectional view taken along line XXVIIID-XXVIIID in FIG.28A in the method of manufacturing the light emitting device accordingto the second embodiment.

FIG. 29 is a schematic sectional view, enlarged one of the lightemitting cells after reducing the thickness of the semiconductor stackby dry etching in the method of manufacturing the light emitting deviceaccording to the second embodiment.

FIG. 30 is a schematic sectional view, enlarged one of the lightemitting cells after roughening the surface of the semiconductor stackby wet etching in the method of manufacturing the light emitting deviceaccording to the second embodiment.

FIG. 31 is a schematic plan view, enlarged one of a portion of the lightemitting device according to the second embodiment.

FIG. 32A is a schematic plan view, enlarged one of the light emittingcells after partitioning a region each of the light emitting cells withgrooves formed by partially etching the semiconductor stack in avariation of the method of manufacturing the light emitting deviceaccording to certain embodiments.

FIG. 32B is a schematic plan view, enlarged one of the light emittingcells after partitioning a region of each of the light emitting cellswith grooves formed by partially etching the semiconductor stack in avariation of the method of manufacturing the light emitting deviceaccording to certain embodiments.

FIG. 32C is a sectional view taken along line XXXIIC-XXXIIC in FIG. 32Bof a variation of the method of manufacturing the light emitting deviceaccording to certain embodiments.

DETAILED DESCRIPTION

The light emitting devices and the methods of manufacturing the lightemitting device according to certain embodiments will be explained withreference to the accompanying drawings. The drawings referenced in theexplanations below are schematic illustrations of the embodiments, andas such, the relative sizes and spacing and the positional relationshipsbetween members might be exaggerated, or members might be partiallyomitted. In the explanations below, the same designations and referencenumerals denote the same members or those of similar type as a generalrule, and repeated detailed explanations may be omitted whenappropriate.

Light Emitting Device 100

The light emitting device 100 according to a first embodiment will beexplained with reference to FIG. 1 to FIG. 3F. The light emitting device100 includes a light emitting cell group 10 which is a collective bodyof light emitting cells, and an IC substrate 20 on which the lightemitting cell group 10 is disposed. Furthermore, the light emittingdevice system 100S includes a light emitting device 100, a secondarymounting substrate 30, a controller 50, and heat dissipater 60. Thelight emitting device 100 includes the light emitting cell group 10 andthe IC substrate 20. The IC substrate 20 of the light emitting device100 is mounted on a secondary mounting substrate 30. The secondarymounting substrate 30 is connected to a controller 50. A heat dissipater60 is attached to the secondary mounting substrate.

First Embodiment Method of Manufacturing Light Emitting Device 100

A method of manufacturing the light emitting device 100 according to thefirst embodiment will be explained with reference to FIG. 3A to FIG. 17.

The method of manufacturing the light emitting device 100 includes: stepSA1 of providing a semiconductor stack; step SA2 of forming a lightemitting cell group configured with a plurality of light emitting cells;step SA3 of exposing a portion of the first semiconductor layer from thesecond semiconductor layer; step SA4 of forming a first insulationlayer; step SA5 of forming a wiring electrode; step SA6 of forming asecond hole; step SA7 of forming a second electrode; step SA8 ofthinning the semiconductor layer; and step SA9 of roughening the surfaceof the semiconductor layer. The first semiconductor layer 12 n, thesecond semiconductor layer 12 p, and the emission layer 12 a are onlyshown in FIG. 5B and FIG. 5C, and are collectively shown as thesemiconductor stack 12 in other drawings FIG. 6A to FIG. 17.

The semiconductor stack providing step SA1 is a step of preparing asemiconductor stack 12 formed on a substrate 11, as shown in FIG. 5A toFIG. 5C. In this step, a semiconductor stack 12 is prepared, in which afirst semiconductor layer 12 n, an emission layer 12 a, and a secondsemiconductor layer 12 p, are successively formed from the substrate 11side. The first semiconductor stack 12 n is an n-type semiconductorlayer, and the second semiconductor stack 12 p is a p-type semiconductorlayer. The semiconductor stack 12 is set to a size so that an externalregion 10Eb can be formed adjacent to the region 10Ea where lightemitting cells 1 is to be formed.

Subsequently, a full-surface electrode forming step is performed to forma full-surface electrode layer 13, which is a p-side full-surfaceelectrode, on the semiconductor stack 12. In the full-surface electrodeforming step, the full-surface electrode layer 13 can be formed, forexample, by sputtering or the like.

Subsequently, a light emitting cell forming step SA2 is performed toform light emitting cells 1. The light emitting cell forming step, asshown in FIG. 6A to FIG. 6C, is a step of forming a plurality of grooves14 a in the semiconductor stack 12, the grooves 14 a dividing thesemiconductor stack 12 into a plurality of light emitting cells tothereby form a light emitting cell group 10. In the light emitting cellforming step, a plurality of light emitting cells 1 are provided incolumns and rows by forming a plurality of grooves 14 a reaching thefirst semiconductor layer 12 n in a grid-shape from the side of thefull-surface electrode layer 13 formed on the upper face of thesemiconductor stack 12. The grooves 14 a are formed by partiallyremoving the semiconductor stack 12 by etching or the like. Here, thegrooves 14 a are formed in a grid-shape to the depth to reach the firstsemiconductor layer 12 n via a mask so as to form the light emittingcells 1 having a rectangular shape when viewed from the top. Forexample, 15 to 40 columns times 15 to 40 rows of light emitting cells 1are defined and formed by the grooves 14 a. The depth of the grooves 14a can be set to be in a range of, for example, from 2.0 to 5.0 μm.

In the light emitting cell forming step, furthermore, the grooves 14 acan be formed in such a manner as to define an external region 10Ebadjacent to the plurality of light emitting cells 1 arranged in columnsand rows, the external region 10Eb extending at least in the rowdirection or column direction of the light emitting cells. Here, thegroove 14 a located at one end in the column direction defines theexternal region 10Eb adjacent to the region 10Ea of the semiconductorstack 12 in which the light emitting cell group 10 is formed. Moreover,the external region 10Eb is continuously formed with a prescribed widthto the size required for forming a first electrode 2 for connection withthe external electrode.

Here, one external region 10Eb is formed to extend in the columndirection of the light emitting cell group 10, but two external regions10Eb may be formed in the column direction, or the external regions 10Ebmay be formed to surround the light emitting cell group by forming themin not only the column direction, but also in the row direction.Furthermore, an external region 10Eb having an annular shape may beformed so as to surround the light emitting cell group 10. Forming aplurality of external regions 10Eb and connecting an external powersource to individual external regions 10Eb can reduce variance in theelectric current being supplied to the plurality of light emitting cells1. This can reduce variance in current density distribution across thelight emitting cell group 10 as a whole, thereby reducing light emissionvariance. A first electrode 2 is formed in the external region 10Eb tobe in electrical connection with the wiring electrode 17 that isdisposed to extend thereto.

Step SA3 of exposing the first semiconductor layer 12 n is a step ofexposing a portion of the first semiconductor layer 12 n from the secondsemiconductor layer 12 p, as shown in FIG. 7A to FIG. 7C, by removingthe second semiconductor layer 12 p and the full-surface electrode layer13. In this exposing step, etching or the like is performed by placing amask over the area excluding the portion to be exposed, thereby exposingthe portion of the first semiconductor layer 12 n from the full-surfaceelectrode layer 13 and the second semiconductor layer 12 p, and creatinga substantially circular exposed region 14 b when viewed from the top.

As shown in FIG. 9A to FIG. 9C, step SA4 is a step of forming a firstinsulation layer 15 in which a first hole 15 a will be formed. In thisfirst insulation layer forming step, the first insulation layer 15 isformed to cover the full-surface electrode layer 13, the grooves 14 a,and the exposed region 14 b. The first insulation layer 15 is adielectric multilayer film in which, for example, layers comprisingsilicon oxide and layers comprising niobium oxide are alternatelystacked serving as a reflective layer that reflects the light from thesemiconductor stack 12. By way of example, the first insulation layer 15is formed to have a thickness in a range of from 600 nm to 1.5 μm bysputtering.

After forming the first insulation layer 15, a first hole forming stepis performed to form a first hole 15 a. In the first hole forming step,a first hole 15 a is formed in the region of the first insulation layer15 that covers the exposed region 14 b. The first hole 15 a is formed toelectrically connect the wiring electrode 17, described below, to thefirst semiconductor layer 12 n. The first hole 15 a is formed byremoving the first insulation layer 15 in the region corresponding tothe exposed region 14 b in whole or part by etching or the like. Thefirst semiconductor layer 12 n is exposed from the first insulationlayer 15 in the region where the first hole 15 a is created.

Before performing the subsequent step, as shown in FIG. 10A to FIG. 10C,a connection electrode forming step SA4 a is performed to dispose aconnection electrode 16 in the first hole 15 a to be in contact andelectrical connection with the first semiconductor layer 12 n. Theconnection electrode forming step is a step of forming a connectionelectrode 16 in the first hole 15 a and on the upper face of the firstinsulation layer 15 immediately surrounding the hole by masking the areasurrounding the first hole 15 a followed by sputtering or the like. Forthe connection electrode 16, for example, titanium, aluminum, or analloy containing either of these metals as a primary component can beused. The connection electrode 16 may be a stack of layers of thesemetals and metal alloys mentioned above. Forming the connectionelectrode 16 reduces electrical resistance between the connectionelectrode 16 and the first semiconductor layer 12 n, thereby attenuatingan increase of forward voltage Vf of the light emitting cell 1 ascompared to the case where the first semiconductor layer 12 n and thewiring electrode 17 are directly connected.

Step SA5, as shown in FIG. 11A to FIG. 11C, is a wiring electrodeforming step that forms a wiring electrode 17 to be in electricalconnection with the first semiconductor layer 12 n via the first hole 15a. In the wiring electrode forming step, the wiring electrode 17 isformed to cover the connection electrode 16, which is in electricalconnection with the first semiconductor layer 12 n at the first hole 15a, and a prescribed region on the first insulation layer 15. The wiringelectrode 17 is formed over the area that excludes prescribed regions 17e where second holes 15 b (and third holes 18 a described below) forelectrical connection with the second electrode 19 will be formed. Thatis, the wiring electrode 17 is formed by forming a mask that covers theprescribed regions 17 e followed by sputtering or the like. Theprescribed regions 17 e, as shown in FIG. 11A, are formed intosubstantially circular holes using a mask. The wiring electrode 17 isformed using, for example, an alloy mainly containing aluminum. Thewiring electrode 17 may be a stack of aluminum alloy layers and othermetal layers, or may be formed by stacking layers each comprising asingle metal such as titanium, and metal alloy layers. Furthermore, twoprescribed regions 17 e are provided per light emitting cell 1 here, butthe number is not limited to that.

Subsequently, a second insulation layer forming step SA5 a is performedto form a second insulation layer 18 in which a third hole 18 a will beformed.

As shown in FIG. 12A to FIG. 12C, the second insulation layer formingstep is a step of forming a second insulation layer 18 on the wiringelectrode 17 and on the first insulation layer 15 exposed from thewiring electrode 17 in the prescribed regions 17 e. The secondinsulation layer 18 is formed, for example, by sputtering or the like.Moreover, for the second insulation layer 18, an insulation layercomprising SiO₂, for example, is disposed to a film thickness in a rangeof from 300 nm to 700 nm.

Subsequently, a hole forming step SA6 is performed to form a third hole18 a in the second insulation layer 18 and second holes 15 b in thefirst insulation layer 15. As shown in FIG. 13A to FIG. 13C, the holeforming step SA6 is a step of forming second holes 15 b and third holes18 a in the second insulation layer 18 at the positions of theprescribed regions 17 e of the second insulation layer 18. The holeforming step SA6 includes a step that constitutes step 6A. That is, inthe hole forming step SA6, a second hole forming step is performed toform second holes in the first insulation layer 15 over the prescribedregions of the upper face of the second semiconductor layer 12 p (i.e.,the prescribed regions 17 e) in each light emitting cell 1.

As shown in FIG. 13A and FIG. 13B, the hole forming step SA6 is a stepof forming second holes 15 b and third holes 18 a in the firstinsulation layer 15 and the second insulation layer 18 in the regions 18e overlapping the prescribed regions 17 e when viewed from the top forconnecting the wiring electrode 17 to the full-surface electrode layer13 for electrical connection with the second semiconductor layer 12 p.The second holes 15 b and the third holes 18 a are created by forming amask having openings in portions of the regions 18 e over the secondinsulation layer 18, and etching the first insulation layer 15 and thesecond insulation layer 18 via the mask. The sizes and the shapes of thesecond holes 15 b formed in the first insulation layer 15 and the thirdholes 18 a formed in the second insulation layer 18 are not particularlylimited, as long as they are formed in the regions 18 e of the secondinsulation layer 18. The second holes 15 b and the third holes 18 a areformed in communication, whereby the full-surface electrode layer 13 ispartially exposed from the second insulation layer 18 and the firstinsulation layer 15.

Step SA7, as shown in FIG. 14A to FIG. 14C, is a second electrodeforming step in which a second electrode 19 is formed to be inelectrical connection with the second semiconductor layer 12 p via thefull-surface electrode 13 in the regions where the second holes 15 b andthe third holes 18 a have been created. The second electrode formingstep forms the second electrode 19, and includes a bump forming stepthat forms bumps 3. In the second electrode forming step, the secondelectrode 19 is formed in the regions where the second holes 15 b andthe third holes 18 a which are in communication with the second holes 15b are disposed to allow the second semiconductor layer 12 p to be inelectrical connection with the second electrode 19 via the full-surfaceelectrode layer 13. The second electrode 19 is a single metal or alloylayer, or multilayer thereof, and is formed by sputtering or the likeusing a mask. The second electrode 19 has a central portion 19 c formedin a recessed shape where the connection electrode 16 is disposed, andthe connection portions 19 g connected to the full-surface electrode 13each formed in a recessed shape in a section. The second electrode 19 ineach light emitting cell 1 is formed in a rectangular shape in theregion surrounded by the grooves 14 a, spacing apart from the grooves 14a. The second electrode 19 can be formed to have an areal ratio in arange of, for example, from 50 to 95% with respect to the areasurrounded by the grooves 14 a when viewed from the top. The thicknessof the second electrode 19 is preferably in a range of from 300 nm to700 nm. When forming the second electrode 19, as shown in FIG. 14D, afirst electrode 2 can be formed in the external region 10Eb spaced apartfrom the second electrode 19, and be in electrical connection with thewiring electrode 17.

After forming the second electrode 19 and the first electrode 2, a bumpforming step is performed to form bumps 3 at prescribed positions of thesecond electrode 19 and the first electrode 2 in order to connect withthe IC substrate 20 described below. In the bump forming step, as shownin FIG. 15A to FIG. 15D, four bumps 3 are formed in a region defined bythe grooves 14 a of the light emitting cell 1. Moreover, four bumps 3are formed in the location where the first electrode 2 is formed tosurround the central portion 2C. The number, diameter, and the height ofthe bumps are not particularly limited. The diameter of the bumps can beset, for example, to about 3.0 to 10 μm.

Following the bump forming step, as shown in FIG. 3A, a light emittingcell group mounting step SA7 a is performed so that the substrate 11including the light emitting cell group 10 are flip-chip mounted on theIC substrate electrode 22 of the IC substrate 20 via the bumps 3.Subsequently, as shown in FIG. 3B, after mounting the light emittingcell group 10 via the bumps 3, a filler 4 is disposed between the upperface of the IC substrate 20 and the lower face or the lateral faces ofthe light emitting cell group 10. Subsequently, as shown in FIG. 3C, thesubstrate 11 is separated from the light emitting cell group 10 mountedon the IC substrate 20 by a separating methods such as laser lift-off(i.e., substrate separating step SA8). The light emitting cell group 10mounted on the IC substrate 20 is now in the state where the secondelectrode 19 in each light emitting cell 1 is connected to the ICsubstrate electrode 22 formed on the IC substrate 20 to correspond tothe individual light emitting cells 1. In this way, the light emittingcells in the light emitting cell group 10 can be individually controlledby using, for example, a controller 50.

Step SA8, as shown in FIG. 3D and FIG. 16, is a semiconductor layerthinning step to reduce the thickness of the first semiconductor layer12 n of the semiconductor stack 12 subsequent to separating thesubstrate 11. In the semiconductor layer thinning step, the firstsemiconductor layer 12 n is thinned so as not to reach the firstinsulation layer 15 formed on the grooves 14 a by dry etching orpolishing from the side of the first semiconductor layer 12 n from whichthe substrate 11 has been removed. In the semiconductor layer thinningstep, for example, reactive ion etching using a chlorine-based gas, canbe employed for dry etching, and chemical mechanical polishing (CMP)using, for example, a slurry or the like for mechanical polishing can beemployed for polishing.

Step SA9, as shown in FIG. 3E and FIG. 17, is a semiconductor layerroughening step to roughen the face of the first semiconductor layer 12n which has been thinned down. In the semiconductor layer rougheningstep, the first insulation layer 15 is exposed from the firstsemiconductor layer 12 n at the locations of the grooves 14 a bypartially removing the first semiconductor layer 12 n in the thicknessdirection by wet etching while performing a surface roughening step onthe face of the first semiconductor layer 12 n which has been subjectedto the removal step SA8. Here, the first insulation layer 15 can beexposed from the first semiconductor layer 12 n at the locations of thegrooves 14 a in one step instead of the two steps, SA8 and SA9,performed as in the case of the present embodiment. For example, thefirst insulation layer 15 can be exposed from the first semiconductorlayer 12 n by performing dry etching or the like from the side of thefirst semiconductor layer 12 n from which the substrate 11 has beenremoved.

In this case, however, the wiring electrode 17, the first insulationlayer 15, the second insulation layer 18, or the like disposed on thegrooves 14 a might be modified or degraded by dry etching. As a result,a light emitting cell 1 can fail to be turned on because of a linedisconnection in the wiring electrode 17 at a position of a groove 14 aor the like. For this reason, in this embodiment, the firstsemiconductor layer 12 n is thinned to the extent not reaching the firstinsulation layer 15 in the semiconductor layer thinning step by dryetching or polishing, and then the first semiconductor layer 12 npositioned under the first insulation layer 15 is removed by wet etchingin the semiconductor layer roughening step. This can reduce themodification or degradation of the wiring electrode 17, the firstinsulation layer 15, and the second insulation layer 18 as compared tothe case of exposing the first insulation layer 15 by dry etching alone.Furthermore, the step of exposing the first insulation layer 15 and thestep of roughening the first semiconductor layer 12 n are concurrentlyperformed without increasing the number of steps.

The wet etching in the semiconductor surface roughening step can beperformed by using, for example, an aqueous solution containing TMAH.The first insulation layer 15 constructed with SiO₂ or the like is lesslikely to be etched by such wet etching, resulting in selectively etchedin the semiconductor stack 12. The surface of the first semiconductorlayer 12 n is roughened so as to have recesses of about 2.5 μm in depth,for example. Roughening of the first semiconductor layer 12 n formsrecesses and protrusions on the surface of the first semiconductor layer12 n thereby increasing the emission efficiency of the emission layer 12a.

In the semiconductor layer roughening step, wet etching is preferablyperformed to position the lower face of the first semiconductor layer 12n closer to the second semiconductor layer 12 p than the wiringelectrode 17 disposed in the grooves 14 a. This makes it difficult forthe light from a light emitting cell 1 to propagate to the adjacentlight emitting cells 1 while allowing the wiring electrode 17 disposedin the grooves 14 a to more readily reflect the light from the lightemitting cell 1. This, as a result, can improve the distinguishabilityof light released from the light emitting device 100.

FIG. 3D and FIG. 16 are different fields of view of the same step whereFIG. 3D is a schematic sectional view of the whole device, and FIG. 16is a schematic enlarged sectional view of one of the light emittingcells 1. Likewise, FIG. 3E and FIG. 17 are different views of anotherstep. FIG. 3E is a section schematically showing the whole device, andFIG. 17 is an enlarged sectional view of one of the light emitting cell1.

Following the semiconductor layer roughening step, a phosphor layerforming step is performed whereby a phosphor layer 5 comprising a baseresin material containing a phosphor which is a wavelength conversionmaterial is formed to cover the roughened first semiconductor layer 12n. In the phosphor layer forming step, the phosphor layer 5 is disposed,for example, by spraying, coating, or dripping such as potting.

The light emitting device 100 manufactured by the steps described abovebecomes a light emitting device system 100S, as shown in FIG. 1, bybeing mounted on a secondary mounting substrate 30, connecting acontroller 50 as a control mechanism to the secondary mounting substrate30, and disposing a heat dissipater 60 for cooling the secondarymounting substrate 30. For the secondary mounting substrate 30, forexample, a ceramic material, such as aluminum nitride, or a glass epoxyresin can be used. For the heat dissipater 60, for example, metals suchas Al or Al alloys can be used.

Subsequently, the construction of the light emitting device 100 will beexplained with reference to the applicable drawings. The light emittingdevice 100 includes a light emitting cell group 10 having a plurality oflight emitting cells 1, an IC substrate 20 to which the light emittingcell group 10 is connected, and a phosphor layer 5 covering the surfaceof the light emitting cell group 10. Between the light emitting cellgroup 10 and the IC substrate 20 of the light emitting device 100, afiller 4 comprising a base resin material containing a light diffusionmaterial is disposed. The base material for the filler 4 preferably isone that is less likely to absorb the light from the light emittingcells 1 and, for example, epoxy resins, silicone resins, modifiedsilicone resins, or the like can be used. For the light diffusionmaterial contained in the filler 4, titanium oxide, aluminum oxide, orthe like can be used. Disposing the filler 4 can facilitate thereflection of the emitted light from the light emitting cell group 10towards the light extraction face which is on the opposite side of theIC substrate 20, thereby increasing the light extraction efficiency.

The light emitting device 100 includes: the first insulation layer 15having a first hole 15 a and second holes 15 b in each light emittingcell 1; a wiring electrode 17 disposed to cover the first insulationlayer 15 and is in electrical connection with the first semiconductorlayer 12 n at the first hole 15 a in each light emitting cell 1; asecond electrode 19 disposed in each light emitting cell 1 and is inelectrical connection with the second semiconductor layer 12 p at thesecond holes 15 b; and a second insulation layer 18 having a third hole18 a positioned between the wiring electrode 17 and the second electrode19. Furthermore, in the light emitting device 100, the first insulationlayer 15 is exposed from the first semiconductor layer 12 n between thelight emitting cells 1, and the light extraction face which is the lowerface of the first semiconductor layer 12 n has a roughened surface. Thelight emitting device 100 may include a connection electrode 16 disposedin contact with the first semiconductor layer 12 n in the first hole toallow the wiring electrode 17 to be in electrical connection with thefirst semiconductor layer 12 n via the connection electrode 16.

Each constituent element of the light emitting device 100 will beexplained below.

The light emitting cell group 10 has a plurality of light emitting cells1 each having a semiconductor stack 12 which includes a firstsemiconductor layer 12 n and a second semiconductor layer 12 p disposedon the upper face of the first semiconductor layer 12 n while exposing aportion of the upper face of the first semiconductor layer 12 n. Asshown in FIG. 2A, the light emitting cells 1 are formed in the region10Ea so as to be arranged in orderly columns and rows. Furthermore, anexternal region 10Eb is disposed adjacent to the region 10Ea along therow direction or the column direction, and a first electrode 2 is formedin the external region 10Eb. The region 10Ea and the external region10Eb are both formed with the semiconductor stack 12.

For the light emitting cells 1, light emitting diodes (LEDs) arepreferably used. Light emitting diodes of a given wavelength can beselected. For blue or green light emitting diodes, for example, thoseemploying ZnSe, nitride-based semiconductor (e.g., InxAlyGa_(1-X-Y)N,0≤X, 0≤Y, X+Y≤1), or GaP can be used.

The IC substrate 20 includes an IC support substrate 21 and a pluralityof IC substrate electrodes 22 formed on the IC support substrate 21.

For the IC support substrate 21, for example, a silicone substrate, SiCsubstrate, GaN substrate, or the like can be used. The IC supportsubstrate 12 can have, for example, a rectangular shape in a top view.The IC support substrate 21 is formed with wiring on the substrate faceor in the substrate so as to be connectable to external electrodes.

The IC substrate electrodes 22 are for electrically connecting the lightemitting cells 1 of the light emitting cell group 10 and the firstelectrode 2, allowing the controller 50 to individually control to turnon the light emitting cells 1. The IC substrate electrodes 22 are formedto correspond to individual bumps 3 so that the bumps 3 formed on theupper faces of the light emitting cells 1 and the bumps 3 formed on theupper face of the first electrode 2 can be individually connected.

The light extraction face of each light emitting cell 1 is the side ofthe first semiconductor layer 12 n on which recesses and protrusions areformed. The light emitting cells 1 each include an electrode structureon the semiconductor stack 12 on the IC support substrate 21 side, andindividual lighting of cells is enabled as electrical connections aremade between the electrode structures and the IC substrate electrodes22. The electrode structure of each light emitting cell 1 includes awiring electrode 17 for electrically connecting the first semiconductorlayer 12 n to the first electrode 2, and a second electrode 19electrically connected to the second semiconductor layer 12 p. Eachlight emitting cell 1 includes a connection electrode 16 for electricalconnection with the wiring electrode 17, and the first semiconductorlayer 12 n is connected to the wiring electrode 17 via the connectionelectrode 16. Moreover, in the light emitting cells 1, a full-surfaceelectrode layer 13 is formed on the second semiconductor layer 12 p ofthe semiconductor stack 12 in the area excluding the exposed regions 14b. In the light emitting cells 1, moreover, the first insulation layer15 is formed between the full-surface electrode layer 13 and the wiringelectrode 17, and a second insulation layer 18 is formed between thewiring electrode 17 and the second electrode 19. For the light emittingcells 1, the first electrode 2 and the second electrodes 19 are disposedon the same side of the light emitting cells 1.

The first electrode 2 is an electrode for supplying an electric currentto the first semiconductor layer 12 n. The first electrode 2 is formedin the external region 10Eb to cover the second insulation layer 18, andis connected to the wiring electrode 17 via the fourth hole 18 d in thesecond insulation layer 18. The first electrode 2, furthermore, is inelectrical connection with the first semiconductor layer 12 n via thewiring electrode 17 and the connection electrode 16. The first electrode2 is formed to a rectangular shape in the external region 10Eb whenviewed from the top. For example, it is preferable to form the firstelectrode 2 by using at least one element selected from among Ti, Al, Alalloys, Ag, and Ag alloys.

The second electrode 19 is an electrode for supplying an electriccurrent to the second semiconductor layer 12 p. The second electrode 19functions as an electrode to uniformly diffuse the electric current tothe second semiconductor layer 12 p as well as concurrently functioningas a reflective film to reflect the light from the light emitting cells1. The second electrode 19 is formed on the upper face of a lightemitting cell 1 in a rectangular shape when viewed from the top. Thesecond electrode 19 is connected to the full-surface electrode layer 13via the third holes 18 a in the second insulation layer 18 and thesecond holes 15 b in the first insulation layer 15, and is in electricalconnection with the second semiconductor layer 12 p via the full-surfaceelectrode layer 13. For example, the second electrode 19 can be formedusing a metal film containing at least one element selected from amongTi, Al, Al alloys, Ag, and Ag alloys. The first electrode 2 and thesecond electrodes 19 here are formed with the same metal at the sametime by a film forming method such as sputtering.

The lower face of the semiconductor stack 12 in each light emitting cell1, which serves as the light extraction face, is preferably positionedcloser to the upper face of the semiconductor stack 12 than the wiringelectrode 17 located in the regions where the first insulation layer 15is exposed from the semiconductor stack 12 in a sectional view of thelight emitting cell 1. This allows the wiring electrode 17 to reflectthe light laterally propagating from a light emitting cell 1, therebyimproving the distinguishability of the illuminating light emitting cellamong the adjacent light emitting cells 1. Specifically, the thicknessof the semiconductor stack 12 in each light emitting cell 1 is, forexample, 1 μm to 10 μm, and the space between the light emitting cells 1is 3 μm to 25 μm.

The full-surface electrode layer 13 is formed using, for example, an ITOfilm, to be connected to the second semiconductor layer 12 p, and inelectrical connection with the second electrode 19. The full-surfaceelectrode layer 13 is formed on the second semiconductor layer 12 pexcept for the locations where the grooves 14 a and the exposed regions14 b are formed. The full-surface electrode layer 13 is a layer fordiffusing an electric current across the entire surface of the secondsemiconductor layer 12 p. The full-surface electrode layer 13 is alsoformed on the second semiconductor layer 12 p in the external region10Eb.

The first insulation layer 15 is formed between the full-surfaceelectrode layer 13 and the wiring electrode 17 to electrically insulatebetween the full-surface electrode layer 13 and the wiring electrode 17.In each light emitting cell 1, the first insulation layer 15 has a firsthole 15 a formed on the first semiconductor layer 12 n and second holes15 b formed on the second semiconductor layer 12 p, and is formed tocover the full-surface electrode layer 13. The first insulation layer 15is exposed from the first semiconductor layer 12 n in the spaces betweenthe light emitting cells 1. The first insulation layer 15 also functionsto protect the semiconductor stack 12 as well as preventing the buildupof static electricity. The first insulation layer 15 is formed, forexample, as a single layer or multiple layers, and can be constructedwith SiO₂, Nb₂O₅, ZrO₂, SiN, SiON, SiC, AlN, or the like. The firstinsulation layer 15 can be configured as a dielectric multilayer film inwhich a plurality of dielectric layers are stacked, and can beconfigured with a dielectric multilayer film designed to reflect thelight from the light emitting cells 1 by alternately stacking, forexample, layers comprising SiO₂ and layers comprising Nb₂O₅. This allowsfor reflection of the laterally propagating light from the lightemitting cells 1 thereby improving the distinguishability of the lightemitting cells 1 when illuminating.

The connection electrode 16 is formed to facilitate the connectionbetween the wiring electrode 17 and the first semiconductor layer 12 n.The connection electrode 16 is preferably formed as a stack structuremade by stacking metals such as AICu, Ti, Ru, or the like. Theconnection electrode 16 is formed in the circular region up to theperipheral edge of the first hole 15 a in the first insulation layer 15.

The wiring electrode 17 has light reflectivity and is disposed to coverthe first insulation layer 15. The wiring electrode 17 is formed to bein electrical connection with the first semiconductor layer 12 n in eachlight emitting cell 1. The wiring electrode 17 here is connected to bein electrical connection with the first semiconductor layer 12 n via theconnection electrode 16. Furthermore, the wiring electrode 17 is formedto have openings, which are prescribed regions 17 e for the electricalconnection between the second electrode 19 and the full-surfaceelectrode layer 13, on both sides of the connection electrode 16. Thewiring electrode 17 is formed as a stacked body here, and is formed bystacking, for example, AlCu, Ti, SiO₂, or the like to their individualthicknesses. Forming the wiring electrode 17 in the region where thefirst insulation layer 15 is exposed from the semiconductor stack 12 ina top view allows for the configuration of a light emitting cell 1 whichis not affected by the light from any of the adjacent light emittingcells 1. Furthermore, part of the wiring electrode 17 disposed betweenadjacent light emitting cells is preferably formed so as to projectcloser to the lower face of the semiconductor stack than the lower faceof the first semiconductor layer 12 n. This allows the wiring electrode17 to reflect the laterally propagating light from the light emittingcells 1, thereby mitigating unintended propagation of light to adjacentlight emitting cells 1 and improving the distinguishability of the lightemitting cell group 10.

The second insulation layer 18 is formed between the wiring electrode 17and the second electrode 19 for electrical insulation between the wiringelectrode 17 and the second electrode 19. The second insulation layer 18is formed on the wiring electrode 17 in region of each of the lightemitting cells 1, and has third holes 18 a formed in the prescribedregions 17 e. The second insulation layer 18 has regions 18 e recessedto the extent substantially equivalent to the thickness of the wiringelectrode 17 formed by the prescribed regions 17 e in the wiringelectrode 17. Moreover, the third holes 18 a of the second insulationlayer 18 are formed to be in communication with the second holes 15 b ofthe first insulation layer 15. The second insulation layer 18 is formedcontinuously on the light emitting cell group 10, as well as on thewiring electrode 17 of the external region 10Eb.

The semiconductor stack 12 is formed in each cell in the light emittingcell group 10, and the first insulation layer 15 exposed between thelight emitting cells 1 define each light emitting cell 1. The lower faceof the first semiconductor layer 12 n has a roughened surface tofacilitate extraction of light from the semiconductor stack 12.

A phosphor layer 5 is formed to cover the light emitting cell group 10,and the lower face of each light emitting cell 1 is covered by thephosphor layer 5. For the phosphor layer 5, for example, a wavelengthconversion material in which base material made of a light transmissiveresin contains phosphor particles, can be used.

The light transmissive resin preferably has light transmissivity for theemitted light from the light emitting elements. Examples of the lighttransmissive resin include silicone resins, epoxy resins, phenol resins,polycarbonate resins, acrylic resins, or their modified resins.

For the phosphor, any phosphor used in the art can be suitably selectedwithout any particular limitations for the type, concentration, or thelike of the phosphor.

The thickness of the phosphor layer 5 is preferably set, for example, to50 μm at most. Setting the thickness of the phosphor layer 5 to 50 μm atmost physically narrows the paths in in-plane directions therebyreducing propagation of light. This can reduce the propagation of thelight from an illuminating light emitting cell 1 to the adjacent lightemitting cells 1 when individually illuminating the light emitting cells1 are.

The light emitting device 100 constructed as above is bonded to asecondary mounting substrate 30. A controller 50 which is a controlunit, is installed on the secondary mounting substrate 30.

Second Embodiment Method of manufacturing Light Emitting Device 100B

Subsequently, the light emitting device manufacturing method accordingto a second embodiment will be explained with reference to FIG. 18 toFIG. 31. The light emitting device manufacturing method according to thesecond embodiment and the light emitting device manufacturing methodaccording to the first embodiment differ in the surface of each lightemitting cell 1 on which the bumps 3 are formed to connect the p/nelectrode side. In the light emitting device manufacturing methodaccording to the first embodiment, bumps 3 formed on the upper face ofeach light emitting cell 1 are connected to the p-side electrode (i.e.,the second electrode 19) whereas in the light emitting devicemanufacturing method according to the second embodiment, the bumps 3formed on the upper face of each light emitting cell 1 are connected tothe n-side electrode (i.e., the first electrode 2). For this reason,some constituent elements will be explained as being formed at differentlocations or different timing even if they have the same names orreference numerals.

The method of manufacturing the light emitting device 100B includes:step SB1 of providing a semiconductor stack 12; step SB2 of forming alight emitting cell group comprising a plurality of light emittingcells; step SB3 of exposing the first semiconductor layer 12 n from thesecond semiconductor layer 12 p; step SB4 of forming a first insulationlayer 15; step of SB5 of forming a wiring electrode 17; step SB6 offorming a first hole 15 a in the first insulation layer 15; step SB7 offorming a first electrode 2; step SB8 of thinning the semiconductorstack 12; and step SB9 of roughening the semiconductor stack 12. Thefirst semiconductor layer 12 n, the second semiconductor layer 12 p, andthe emission layer 12 a are shown only in FIG. 19B and FIG. 19C, and arecollectively shown as the semiconductor stack 12 in the remaining FIG.19A and FIG. 20 to FIG. 31. The materials and layout of the membersalready explained will be denoted with the same reference numerals forwhich the explanations might be abbreviated when appropriate.

The semiconductor stack providing step SB1 is a step of providing asemiconductor stack 12 formed on a substrate 11. In this providing step,a semiconductor stack 12 including an n-type semiconductor layer whichis a first semiconductor layer 12 n, the emission layer 12 a, and thep-type semiconductor layer which is a second semiconductor layer 12 pare provided by forming in that order from the substrate 11 side. Thesemiconductor stack 12 is set to a size so that an external region 10Ebcan be formed adjacent to the region 10Ea in which the light emittingcells 1 will be formed.

Subsequently, a full-surface electrode forming step is performed to forma full-surface electrode layer 13 on the semiconductor stack 12,full-surface electrode layer 13 being a p-side full-surface electrode.In the full-surface electrode forming step, the full-surface electrodelayer 13 can be formed, for example, by sputtering or the like.

Then the light emitting cell forming step SB2 is performed to form thelight emitting cells 1. As shown in FIG. 20A to FIG. 20C, in the lightemitting cell forming step, a light emitting cell group 10 are formed bypartitioning the semiconductor stack 12 into a plurality of regions forthe light emitting cells 1 by forming a plurality of grooves 14 a in thesemiconductor stack 12. The light emitting cell forming step defines andforms the light emitting cells 1 arranged in orderly columns and rows byforming a grid-shaped grooves 14 a reaching the first semiconductorlayer 12 n, for example, by etching from the full-surface electrodelayer 13 formed on the upper face of the semiconductor stack 12.

In the light emitting cell forming step, furthermore, the grooves 14 acan be formed in such a manner as to define an external region 10Ebadjacent to the light emitting cells 1 arranged in columns and rows, theexternal region 10Eb extending at least in the row direction or columndirection of the light emitting cells. The wiring electrode 17 is formedto extend to the external region 10Eb in which a second electrode 19 isformed to be in electrical connection with the wiring electrode 17.Here, one external region 10Eb is formed to extend in the columndirection of the light emitting cell group 10, but the layout of theexternal region 10Eb can be changed as in the case of the firstembodiment described above.

In the first semiconductor layer exposing step SB3, the firstsemiconductor layer 12 n is exposed as shown in FIG. 21A to FIG. 21C. Inthis step a portion of the first semiconductor layer 12 n from thesecond semiconductor layer 12 p by partially removing the secondsemiconductor layer 12 p and the full-surface electrode layer 13 byetching or the like using a mask. In this exposing step, an exposedregion 14 b having substantially circular shape is formed in a top viewby exposing the first semiconductor layer 12 n from the full-surfaceelectrode layer 13 and the second semiconductor layer 12 p.

As shown in FIG. 22A to FIG. 22C, step SB4 is a first insulation layerforming step that forms a first insulation layer 15 in which a firsthole 15 a and second holes 15 b are to be formed. In the firstinsulation layer forming step, the first insulation layer 15 is formedto cover the full-surface electrode layer 13, the grooves 14 a, and theexposed region 14 b. For the first insulation layer 15, a similarmaterial to that employed in the first embodiment described above can beused.

After forming the first insulation layer 15, second holes forming stepis performed to form the second holes 15 b. The second holes 15 b isformed at two locations, on both sides of and spaced apart from theexposed region 14 b covered by the first insulation layer 15. In thesecond hole forming step, the second holes 15 b are formed so that thewiring electrode 17 is in electrical connection with the secondsemiconductor layer 12 p via the full-surface electrode layer 13. Thesecond holes 15 b are formed in a circular shape here, but there are nolimitations for the number or the shape. Moreover, the first insulationlayer 15 has a recessed part 15 c in the region that covers the exposedregion 14 b. The first insulation layer 15 is also disposed in thegrooves 14 a.

As shown in FIG. 24A to FIG. 24C, step SB5 is a wiring electrode formingstep to form a wiring electrode 17 to be in electrical connection withthe second semiconductor layer 12 p via the second holes 15 b. In thewiring electrode forming step, the wiring electrode 17 is formed tocover part of the full-surface electrode layer 13 exposed at the secondholes 15 b as well as the first insulation layer 15 except for therecessed part 15 c. The wiring electrode 17 is formed on the firstinsulation layer 15 excluding the recessed part 15 c region where afirst hole 15 a is to be formed to be in electrical connection with thefirst electrode 2 by way of the opening 17 a of the wiring electrode 17.That is, the wiring electrode 17 is formed, for example, by sputteringby forming a mask that covers the recessed part 15 c. The wiringelectrode 17 is formed on the first insulation layer 15 so as to beconnected by the connection parts 17 g to the full-surface electrodelayer 13 via the second holes 15 b. In the wiring electrode 17, theconnection parts 17 g connected to the full-surface electrode layer 13are recessed by the second holes 15 b by about the layer thickness. Thewiring electrode 17 is also formed on the first insulation layer 15 inthe grooves 14 a.

Subsequently, a second insulation layer forming step SB5 a is performedto form a second insulation layer 18 in which a third hole 18 a will beformed.

As shown in FIG. 25A to FIG. 25C, the second insulation layer formingstep SB5 a is a step of forming a second insulation layer 18 on thewiring electrode 17 and on the recess 15 c of the first insulation layer15 exposed by the opening 17 a of the wiring electrode 17. The secondinsulation layer 18 can be formed, for example, by sputtering or thelike. Moreover, the second insulation layer 18 has the central recessedpart 18 c formed along the recessed part 15 c of the first insulationlayer 15 and the recessed parts 18 g formed along the connection parts17 g of the wiring electrode 17. The second insulation layer 18 is alsoformed on the wiring electrode 17 at the grooves 14 a. The secondinsulation layer 18 is formed by disposing, for example, a layer mainlycontaining SiO₂ in a layer thickness in a range of from 300 to 700 nm.

Subsequently, a hole forming step SB6 is performed to form a third hole18 a in the second insulation layer 18 while forming a first hole 15 ain the first insulation layer 15. As shown in FIG. 26A to FIG. 26D, thehole forming step SB6 is a step of forming the first hole 15 a of thefirst insulation layer 15 and the third hole 18 a of the secondinsulation layer 18 at the position of the central recessed part 18 c ofthe second insulation layer 18. The hole forming step includes the stepthat constitutes step SB6. That is, in the hole forming step SB6, thethird hole 18 a of the second insulation layer 18 is formed on or abovethe prescribed region (i.e., the central recessed part 18 c) of theupper face of the first semiconductor layer 12 n while concurrentlyperforming the first hole forming step to form the first hole 15 a inthe first insulation layer 15 in each light emitting cell 1.

As shown in FIG. 26A and FIG. 26B, in the hole forming step SB6, thefirst hole 15 a of the first insulation layer 15 and the third hole 18 aof the second insulation layer 18 are formed in the circular recessedregion which is the central recessed part 18 c of the second insulationlayer 18 when viewed from the top. The first hole 15 a and the thirdhole 18 a are formed by forming a mask having an opening for the centralrecessed part 18 c of the second insulation layer 18 followed by etchingvia the mask. The sizes or shapes of the first hole 15 a formed in thefirst insulation layer 15 and the third hole 18 a formed in the secondinsulation layer 18 are not limited as long as they fit in the centralrecessed part 18 c of the second insulation layer 18. The first hole 15a and the third hole 18 a are formed to be in communication with oneanother, and expose a portion of the first semiconductor layer 12 n fromthe second insulation layer 18 and the first insulation layer 15.

As shown in FIG. 26D, in the hole forming step a fourth hole 18 d forelectrical connection with the second semiconductor layer 12 p is formedin the second insulation layer 18 in the external region 10Eb. Thefourth hole 18 d is formed at the time the first hole 15 a of the firstinsulation layer 15 and the third hole 18 a of the second insulationlayer 18 being formed. That is, the fourth hole 18 dis formedconcurrently with the first hole 15 a and the third hole 18 a by forminga mask having an opening for the region for the central recessed part 18c of the second insulation layer 18 and an opening for the fourth hole18 d, followed by performing etching via the mask.

As shown in FIG. 27A to FIG. 27D, step SB7 is a first electrode formingstep to form a first electrode 2 in electrical connection with the firstsemiconductor layer 12 n in the region where the first hole 15 a of thefirst insulation layer 15 and the third hole 18 a of the secondinsulation layer 18 are created. In the first electrode forming step,the first electrode 2 is formed while concurrently being formed thesecond electrode 19 on the second insulation layer 18 in the externalregion 10Eb. The first electrode forming step includes a bump formingstep to form bumps 3. In the first electrode forming step, the firstelectrode 2 is formed in the region where the first hole 15 a and thethird hole 18 a are disposed to be in electrical connection with thefirst semiconductor layer 12 n. The first electrode 2 is a single layerof a metal or alloy, or multilayer thereof, which are used forelectrodes, and is formed by sputtering or the like while using a mask.

The first electrode 2 has a central part 2 c having a recessed form in asectional view, and recessed parts 2 g formed on both sides of thecentral part 2 c and spaced apart from the central part 2 c. The firstelectrode 2 is formed to a rectangular shape spaced apart from thegrooves 14 a in the center of the region surrounded by the grooves 14 ain each light emitting cell 1. The first electrode 2 in a top view canbe formed to have an areal ratio of from 50 to 95% to the regionsurrounded by the grooves 14 a as an example. The thickness of the firstelectrode 2 is preferably in a range of from 300 nm to 700 nm. Whenforming the first electrode, as shown in FIG. 27D, a second electrode 19in electrical connection with the second semiconductor layer 12 p can beformed in the same process.

In step SB7, the first electrode 2 and the second electrode 19 areformed on the second insulation layer 18 of the region 10Ea and thesecond insulation layer 18 of the external region 10Eb, respectively, bydisposing a mask over the grooves 14 a and prescribed regions of thesecond insulation layer 18 surrounded by the grooves 14 a. The firstelectrode 2 and the second electrode 19 are configured with a singlelayer or multilayer of metals or alloys employed for the electrodes, andare formed by sputtering or the like by using a mask. The firstelectrode 2 is formed spaced apart from the grooves 14 a and in arectangular shape in the center of the area surrounded by the grooves 14a in each light emitting cell 1 with an areal ratio in a range of, forexample, from 50 to 95%. Preferably, the first electrode 2 and thesecond electrode 19 each have a thickness in a range of from 300 nm to700 nm. The second electrode 19, which is formed in the external region10Eb, is formed spaced apart from the first electrode 2 via a groove 14a.

After forming the first electrode 2 and the second electrode 19, a bumpforming step is performed to form bumps 3 at prescribed positions of thefirst electrode 2 and the second electrode 19 to connect with the ICsubstrate 20 described below. As shown in FIG. 28A to FIG. 28D, in thebump forming step, four bumps 3 are formed in each light emitting cell 1region defined by the grooves 14 a. On the second electrode 19, fourbumps 3 are formed in the surrounding of each electrode connection part19 g. For the bumps 3, those similar to the bumps formed in the firstembodiment described above can be used.

Following the bump forming step, as shown in FIG. 3A, an light emittingcell mounting step SB7 a is performed to film chip mount the substrate11 having the light emitting cell group 10 disposed thereon to the ICsubstrate electrodes 22 of the IC substrate 20 via the bumps 3. Thelight emitting cell mounting step can be performed in the same orsimilar manner as in the first embodiment. Subsequently, similar to thefirst embodiment, a filler 4 is disposed as shown in FIG. 3B, thesubstrate 11 is separated by a laser lift-off process as shown in FIG.3C, followed by performing a semiconductor layer thinning step SB8 asshown in FIG. 3E and FIG. 29, and a semiconductor layer roughening stepSB9 as shown in FIG. 3F and FIG. 30.

FIG. 3D and FIG. 29 are different fields of view of the same step whereFIG. 3D is a schematic sectional view of the entire device, whereas FIG.29 is an enlarged schematic sectional view of one of the light emittingcells 1. Likewise, FIG. 3E and FIG. 30 are different fields of view ofthe same step where FIG. 3E is a schematic section of the entire device,whereas FIG. 30 is an enlarged schematic sectional view of one of thelight emitting cells 1.

Subsequent to the semiconductor layer roughening step, a phosphor layerforming step and the like may be performed in the same or similar mannerto those in the first embodiment described above.

Subsequently, the light emitting device 100B manufactured by the lightemitting device manufacturing method according to the second embodimentwill be explained. The light emitting device 100B is constructed so thatthe positions of the first electrode 2 and the second electrode 19 arereversed relative to the light emitting device 100 explained previously.That is, the second electrode 19 is disposed in the external region 10Eband the first electrode 2 is disposed in the region 10Ea where the lightemitting cells 1 are formed. The light emitting device 100B according tothe second embodiment will be explained below focusing on theconstruction of the first electrode 2 and the second electrode 19 thatdiffer from light emitting device 100 according to the first embodiment.

The light emitting device 100B includes a light emitting cell group 10having a plurality of light emitting cells 1, an IC substrate 20 towhich the light emitting cell group 10 is connected, and a phosphorlayer 5 covering the surface of the light emitting cell group 10. Thelight emitting device 100B includes a first insulation 15 having a firsthole 15 a and second holes 15 b in each light emitting cell 1; a wiringelectrode 17 disposed to cover the first insulation layer 15 and be inelectrical connection with the second semiconductor layer 12 p via thesecond holes 15 b in each light emitting cell 1; a second electrode 19disposed in each light emitting cell 1 and connected to the wiringelectrode 17 in electrical connection with the second semiconductorlayer 12 p via the second holes 15 b; and a second insulation layer 18disposed between the wiring electrode 17 and the second electrode 19 andhaving a third hole 18 a. Moreover, in the light emitting device 100B,the first insulation layer 15 is exposed from the first semiconductorlayer 12 n between the light emitting cells 1, and the light extractionface, which is the lower face of the first semiconductor layer 12 n, hasa roughened surface. The light emitting device 100B has a full-surfaceelectrode layer 13 disposed on the second semiconductor layer 12 p.

The light emitting cell group 10 has a plurality of light emitting cells1 arranged in orderly columns and rows. The light emitting cells 1 eachincludes the semiconductor stack 12 in which the second semiconductorlayer 12 p, the emission layer 12 a, and the first semiconductor layer12 n are successively layered from the IC support substrate 21 side, anduses the first semiconductor layer 12 n side as the light emission face.

The electrode structure of the light emitting cells 1 includes the firstelectrode and the wiring electrode 17. The first electrode is inelectrical connection with the first semiconductor layer 12 n via thefirst hole 15 a. The wiring electrode 17 has light reflectivity, isdisposed to cover the first insulation layer, and is in electricalconnection with the second semiconductor layer 12 p via the second holes15 b in each light emitting cell 1. Furthermore, a second insulationlayer 18 having a third hole in communication with the first hole 15 ain each light emitting cell 1 is disposed on the wiring electrode 17.

The first electrode 2 is an electrode for supplying an electric currentto the first semiconductor layer 12 n. The first electrode 2 is formedin a rectangular shape in a top view so as to cover the secondinsulation layer 18. The first electrode 2 is physically andelectrically connected with the first semiconductor layer 12 n via thethird hole 18 a of the second insulation layer 18 and the first hole 15a of the first insulation layer 15. For the first electrode 2, onesimilar to that described in reference to the first embodiment can beused.

The second electrode 19 is an electrode for supplying an electriccurrent to the second semiconductor layer 12 p. The second electrode 19is formed in the external region 10Eb to cover the second insulationlayer 18, is connected to the wiring electrode 17 via the fourth hole 18d of the second insulation layer 18, and in electrical connection withthe second semiconductor layer 12 p via the wiring electrode 17. Thesecond electrode 19 is formed in the external region 10Eb in arectangular shape when viewed from the top. For the second electrode 19,one similar to that described in reference to the first embodiment canbe used.

Similar to in the first embodiment, part of the wiring electrode 17disposed between adjacent light emitting cells 1 is projected closertowards the lower face than the lower face of the first semiconductorlayer 12 n.

The light emitting cells 1 including the first electrode 2 and thesecond electrode 19 as described above are mounted on the IC substrate20 as a light emitting cell group 10 in the light emitting device 100Bso that the light emitting cells 1 can be individually controlled toilluminate.

The method of manufacturing the light emitting device 100B and the lightemitting device 100B according to the second embodiment constructed asabove can achieve similar effects to those achieved by the firstembodiment.

As shown in FIGS. 32A, 32B and 32C, the light emitting cell forming stepSA2 or SB2 for forming the light emitting cells includes removing aportion of the semiconductor stack 12 in a region within each of thelight emitting cells 1 each of which is in a rectangular region definedby the grooves 14 a, and forming grooves 14 w from the upper face of thesemiconductor stack 12 to have the grooves 14 w each of which reach thefirst semiconductor layer 12 n. Such grooves 14 w are formed to mitigateprogression of light propagating from one of the light emitting cells 1to the adjacent one(s) of the light emitting cells 1 defined by thegrooves 14 w, but not to define the region within each of the lightemitting cells 1 from the semiconductor stack 12. If one of the lightemitting cells 1 is individually turned on by individually control thelight emitting cells, light emitted from the intentionally lit lightemitting cell may propagate to the adjacent light emitting cells thatare not intended to be lit, thereby causing poor distinguishability.However, forming the above-described grooves 14 w in the region withineach of the light emitting cells 1 defined by the grooves 14 a canmitigate the light propagating to the light emitting cells that are notintended to be lit, thereby improving distinguishability. The grooves 14w in the region within each of the light emitting cells 1 can be formed,for example, in columns and rows, a grid-shape, or a concentric circleshape, with respect to the regions to be the light emitting cells 1. Thegrooves 14 w can be formed at the same time as or after the grooves 14 aare formed. The grooves 14 w has the same or substantially same depth asthat of the grooves 14 a. FIGS. 32B and 32C show examples in which thegrooves 14 w are formed in the grid-shape in the region within each ofthe light emitting cells 1. As shown in FIG. 32B, in the case where thegrooves 14 w define the plurality of regions to divide into theplurality of light emitting cells 1, the first hole 15 a and the secondholes 15 b are formed in the plurality of regions (i.e., nine regions inthe figures). Accordingly, subsequent steps are performed in such amanner as to realize the same or substantially same sectional view asshown in the FIGS. 15A to 15D or FIGS. 28A to 28D which have beendescribed. The first electrode 2 or the second electrode 19 electricallyconnect the first hole 15 a and the second holes 15 b in each of theregions defined by the grooves 14 w (i.e., nine regions in the figures).The rest of the manufacturing steps in the second embodiment is the sameas the first embodiment except for forming the grooves 14 w in theregions to be the light emitting cells 1, therefore, the descriptionthereof is omitted. The first hole 15 a and the second holes 15 b inFIG. 32B are imaginary illustrated to show the hole 15 a and the holes15 b formed in the other manufacturing step so as to be the samestructure. Accordingly, the first hole 15 a and the second holes 15 bare formed in the subsequent step, but not formed at the time thegrooves 14 w being formed.

As shown in FIG. 1A, the controller 50 of the light emitting devicesystem 100S drives the light emitting cells 1, for example, in a passivematrix manner. The wiring for allowing the controller 50 to drive thelight emitting cells 1 in a passive matrix manner is formed on the ICsubstrate 20 and the secondary mounting substrate. Each of the lightemitting cells 1 in the light emitting device system 100S can be lit ina passive matrix manner, thereby enabling a wide expanse of lightextraction as indicated by outgoing light B1, for example, in FIG. 1 byilluminating all of the light emitting cells 1. The light emittingdevice system 100S, moreover, can output annular bright light with adark center as indicated by outgoing light B2 by turning off the lightemitting cells 1 located in the central portion while turning on thelight emitting cells 1 located in the outer peripheral portion of thelight emitting cell group 10. Furthermore, the system can output lightwhich is bright only in the center as indicated by outgoing light B3 byturning on only the light emitting cells 1 located in the centralportion while turning off the light emitting cells 1 in the outerperipheral portion.

Heat H is generated when the light emitting cells 1 are lit in the lightemitting device system 100S, therefore a heat dissipater 60 is installedon the secondary mounting substrate 30. This can dissipate the heat Hgenerated by the light emitting device system 100S via the heatdissipater 60. Thus, the light emitting device 100S can maintain astable operation.

The embodiments described in the forgoing have been explained asincluding a connection electrode 16, but the light emitting devices maybe constructed by forming a wiring electrode 17 without disposing aconnection electrode 16.

Furthermore, although a second insulation layer 18 was included in thelight emitting device of the above-described embodiments, the secondinsulation layer 18 is not required, and the first electrode 2 and thesecond electrode 19 may be arranged so as not to be in electricalconnection.

Moreover, the light emitting device 100 or 100B may be constructedwithout including a full-surface electrode 13 disposed on the secondsemiconductor layer 12 p.

What is claimed is:
 1. A method of manufacturing a light emittingdevice, the method comprising: providing a semiconductor stack includinga first semiconductor layer, and a second semiconductor layer disposedon an upper face of the first semiconductor layer; forming a pluralityof light emitting cells arranged in column and row directions by forminga plurality of grooves in the semiconductor stack from an upper faceside of the semiconductor stack, the grooves reaching the firstsemiconductor layer; exposing a portion of the first semiconductor layerfrom the second semiconductor layer by partially removing the secondsemiconductor layer from an upper face side of the second semiconductorlayer in each of the light emitting cells; forming a first insulationlayer continuously on the light emitting cells and the grooves, thefirst insulation layer having a first hole on the first semiconductorlayer exposed from the second semiconductor layer in each of the lightemitting cells; forming a wiring electrode to be in electricalconnection with the first semiconductor layer at the first hole in eachof the light emitting cells so as to cover the first insulation layer onor above the upper face of the second semiconductor layer excluding aprescribed region; forming a second hole in the first insulation layeron or above the prescribed region of the upper face of the secondsemiconductor layer in each of the light emitting cells; forming asecond electrode in each of the light emitting cells to be in electricalconnection with the second semiconductor layer at the second hole;thinning the first semiconductor layer from a lower face side of thefirst semiconductor layer by dry etching or polishing so as not to reachthe first insulation layer formed on the grooves; and subsequent to thestep of thinning the first semiconductor layer by dry etching, removinga portion of the first semiconductor layer in a thickness direction fromthe lower face side of the first semiconductor layer by wet etching,thereby exposing the first insulation layer from the first semiconductorlayer at locations of the grooves while roughening a surface of thefirst semiconductor layer that has been partially removed by the step ofthinning the first semiconductor layer.
 2. The method of manufacturing alight emitting device according to claim 1, further comprising:subsequent to the step of forming a wiring electrode, forming a secondinsulation layer on the wiring electrode and the first insulation layerexposed from the wiring electrode, the second insulation layer having athird hole in communication with the second hole; wherein, in the stepof forming the second electrode, the second electrode is formed on thesecond insulation layer to be in electrical connection with the secondsemiconductor layer via the second hole and the third hole.
 3. Themethod of manufacturing a light emitting device according to claim 1further comprising, prior to the step of forming the wiring electrode,disposing a connection electrode in the first hole in contact andelectrical connection with the first semiconductor layer.
 4. The methodof manufacturing a light emitting device according to claim 1, wherein:in the step of forming the grooves in the semiconductor stack, thegrooves are formed such that an external region is disposed adjacent tothe light emitting cells to extend at least in the row direction or thecolumn direction of the light emitting cells, and the wiring electrodeis formed to extend onto the external region to be in electricalconnection with the first electrode disposed in the external region. 5.The method of manufacturing a light emitting device according to claim1, wherein, in the step of forming the grooves in the semiconductorstack, the grooves reaching the first semiconductor layer are formed ina region within each of the light emitting cells, and the grooves areformed from the upper face side of the semiconductor stack.
 6. A methodof manufacturing a light emitting device, the method comprising:providing a semiconductor stack including a first semiconductor layerand a second semiconductor layer disposed on an upper face of the firstsemiconductor layer; forming a plurality of light emitting cellsarranged in column and row directions by forming a plurality grooves inthe semiconductor stack from an upper face side of the semiconductorstack, the grooves reaching the first semiconductor layer; exposing aportion of the first semiconductor layer from the second semiconductorlayer by partially removing the second semiconductor layer from an upperface side of the second semiconductor layer in each of the lightemitting cells; forming a first insulation layer continuously on thelight emitting cells and the grooves, the first insulation layer havinga second hole above a prescribed region of the upper face of the secondsemiconductor layer in each of the light emitting cells; forming awiring electrode to be in electrical connection with the secondsemiconductor layer at the second hole in each of the light emittingcells so as to cover the first insulation layer on or above the upperface of the second semiconductor layer excluding the prescribed region,the first hole being formed in the first semiconductor layer and thefirst insulation layer; forming a first hole in the first insulationlayer on or above the first semiconductor layer exposed from the secondsemiconductor layer in each of the light emitting cells; forming a firstelectrode in each of the light emitting cells to be in electricalconnection with the first semiconductor layer at the first hole;thinning the first semiconductor layer from a lower face side of thefirst semiconductor layer by dry etching or polishing so as not to reachthe first insulation layer formed on the grooves; and subsequent to thestep of thinning the first semiconductor layer, removing a portion ofthe first semiconductor layer in a thickness direction from the lowerface side of the first semiconductor layer by wet etching, therebyexposing the first insulation layer from the first semiconductor layerat locations of the grooves while roughening a surface of the firstsemiconductor layer partially removed by step of thinning the firstsemiconductor layer.
 7. The method of manufacturing a light emittingdevice according to claim 6, further comprising: subsequent to the stepof forming a wiring electrode, forming a second insulation layer on thewiring electrode and the first insulation layer exposed from the wiringelectrode, the second insulation layer having a third hole incommunication with the first hole; wherein, in the step of forming thesecond electrode, the first electrode is formed on the second insulationlayer to be in electrical connection with the first semiconductor layervia the first hole and the third hole.
 8. The method of manufacturing alight emitting device according to claim 7, wherein: in the step offorming the grooves in the semiconductor stack, the grooves are formedsuch that an external region is disposed adjacent to the light emittingcells to extend at least in the row direction or the column direction ofthe light emitting cells, and the wiring electrode is formed to extendonto the external region to be in electrical connection with the secondelectrode disposed in the external region.
 9. The method ofmanufacturing a light emitting device according to claim 6, wherein, inthe step of forming the grooves in the semiconductor stack, the groovesreaching the first semiconductor layer are formed in a region withineach of the light emitting cells, and the grooves are formed from theupper face side of the semiconductor stack.
 10. The method ofmanufacturing a light emitting device according to claim 1, wherein thewet etching is performed such that the lower face of the firstsemiconductor layer is positioned closer to the second semiconductorlayer than the wiring electrode disposed at the grooves.
 11. The methodof manufacturing a light emitting device according to claim 6, whereinthe wet etching is performed so that the lower face of the firstsemiconductor layer is positioned closer to the second semiconductorlayer than the wiring electrode disposed at the grooves.
 12. The methodof manufacturing a light emitting device according to claim 1, wherein:the semiconductor stack is formed on a substrate; and the method furthercomprises, subsequent to the step of forming the second electrode,separating the substrate.
 13. The method of manufacturing a lightemitting device according to claim 8, wherein: the semiconductor stackis formed on a substrate; and the method further comprises, subsequentto the step of forming the second electrode, separating the substrate.14. The method of manufacturing a light emitting device according toclaim 1, further comprising, prior to the step of forming the grooves inthe semiconductor stack, forming a full-surface electrode layer on theupper face of the second semiconductor layer to be in electricalconnection with the second semiconductor layer.
 15. A light emittingdevice comprising: a plurality of light emitting cells arranged incolumn and row directions, each light emitting cell including asemiconductor stack that includes a first semiconductor layer and asecond semiconductor layer, the second semiconductor layer beingdisposed on the upper face of the first semiconductor layer such that aportion of an upper face of the first semiconductor layer is exposedfrom the second semiconductor layer; a first insulation layercontinuously disposed on the light emitting cells and having a firsthole located on the first semiconductor layer exposed from the secondsemiconductor layer in each of the light emitting cells, and a secondhole located on the second semiconductor layer in each of the lightemitting cells; a wiring electrode having light reflectivity anddisposed to cover the first insulation layer to be in electricalconnection with the first semiconductor layer at the first hole in eachof the light emitting cells; and a second electrode disposed in each ofthe light emitting cells to be in electrical connection with the secondsemiconductor layer at the second hole; wherein the first insulationlayer is exposed from the first semiconductor layer between theplurality of light emitting cells; and wherein the lower face of thefirst semiconductor layer has a roughened surface.
 16. The lightemitting device according to claim 15, further comprising: a secondinsulation layer having a third hole in communication with the secondhole in each of the light emitting cells; wherein the second electrodeis disposed over the second insulation layer to be in electricalconnection with the second semiconductor layer via the second hole andthe third hole.
 17. The light emitting device according to claim 15,wherein the wiring electrode includes a connection electrode disposed inthe first hole in contact with the first semiconductor layer.
 18. Thelight emitting device according to claim 15, wherein at least part ofthe wiring electrode is connected to the first electrode formed adjacentto the light emitting cells and extending along the row direction or thecolumn direction of the light emitting cells.
 19. The light emittingdevice according to claim 15, further comprising: a full-surfaceelectrode layer having light reflectivity disposed on an upper face ofthe second semiconductor layer in each of the light emitting cells;wherein the second electrode is in electrical connection with thefull-surface electrode layer via the second hole.
 20. The light emittingdevice according to claim 15, wherein part of the second electrode isdisposed to overlap the wiring electrode when the light emitting cellsare viewed from the top.
 21. A light emitting device comprising: aplurality of light emitting cells arranged in column and row directions,each light emitting cell including a semiconductor stack that includes afirst semiconductor layer and a second semiconductor layer, the secondsemiconductor layer being disposed on the upper face of the firstsemiconductor layer such that a portion of an upper face of the firstsemiconductor layer is exposed from the second semiconductor layer; afirst insulation layer continuously disposed on the light emitting cellsand having a first hole located on the first semiconductor layer exposedfrom the second semiconductor layer in each of the light emitting cells,and a second hole located on the second semiconductor layer in each ofthe light emitting cells; a first electrode disposed in each of thelight emitting cells to be in electrical connection with the firstsemiconductor layer at the first hole; and a wiring electrode havinglight reflectivity and disposed to cover the first insulation layer tobe in electrical connection with the second semiconductor layer at thesecond hole in each of the light emitting cells; wherein the firstinsulation layer is exposed from the first semiconductor layer betweenthe light emitting cells; and wherein a lower face of the firstsemiconductor layer has a roughened surface.
 22. The light emittingdevice according to claim 21, further comprising: a second insulationlayer disposed on the wiring electrode and having a third hole incommunication with the first hole in each of the light emitting cells;wherein the first electrode is disposed on the second insulation layerto be in electrical connection with the first semiconductor layer viathe first hole and the third hole.
 23. The light emitting deviceaccording to claim 21, wherein at least part of the wiring electrode isconnected to the second electrode formed adjacent to the light emittingcells and extending in the row direction or the column direction of thelight emitting cells.
 24. The light emitting device according to claim21, further comprising: a full-surface electrode layer having lightreflectivity disposed on an upper surface of the second semiconductorlayer in each of the light emitting cells; wherein the wiring electrodeis in electrical connection with the full-surface electrode layer viathe second hole.
 25. The light emitting device according to claim 21,wherein part of the first electrode is disposed to overlap the wiringelectrode when the light emitting cells are viewed from the top.
 26. Thelight emitting device according to claim 15, wherein part of the wiringelectrode disposed between adjacent ones of the light emitting cellsprojects lower than the lower face of the first semiconductor layer. 27.The light emitting device according to claim 21, wherein part of thewiring electrode disposed between adjacent ones of the light emittingcells projects lower than the lower face of the first semiconductorlayer.
 28. The light emitting device according to claim 18, wherein thefirst electrode is an n electrode; the second electrode is a pelectrode; the first semiconductor layer is an n-side semiconductorlayer; and the second semiconductor layer is a p-side semiconductorlayer.
 29. The light emitting device according to claim 23, wherein thefirst electrode is an n electrode; the second electrode is a pelectrode; the first semiconductor layer is an n-side semiconductorlayer; and the second semiconductor layer is a p-side semiconductorlayer.
 30. The light emitting device according to claim 15, wherein thegrooves reaching the first semiconductor layer are formed in a regionwithin each of the light emitting cells, and the grooves are formed fromthe upper face side of the semiconductor stack.
 31. The light emittingdevice according to claim 21, wherein the grooves reaching the firstsemiconductor layer are formed in a region within each of the lightemitting cells, and the grooves are formed from the upper face side ofthe semiconductor stack.